Course Title:
Introduction to Microelectromechanical Systems (MEMS)
Course Description:
Provides an introduction to microelectromechanical systems including principles of sensing and actuation, microfabrication technology for MEMS, noise concepts, and packaging techniques. Covers a wide range of disciplines, from electronics to mechanics, material properties, microfabrication technology, electromagnetics, and optics. Studies several classes of devices including inertial measurement devices, pressure sensors, rf components, and optical MEMS. Devotes the last third of the semester largely to design projects, involving design of MEMS devices to specifications in a realistic fabrication process.
Fall Offering:
None
Lab/Coreq 1:
Spring Offering:
None
Lab/Coreq 2:
Summer Offering:
None
Lab/Coreq Remarks:
Summer 1 Offering:
None
Prerequisite 1:
Summer 2 Offering:
None
Prerequisite 2:
Cross-Listed Course 1:
ECE G244
Prerequisite 3:
Cross-Listed Course 2:
Prerequisite 4:
Cross-Listed Course 3:
Prerequisite 5:
Cross-Listed Course 4:
Prerequisite Remarks:
Admission to the Graduate School of Engineering.
Cross-Listed Course 5:
Repeatable:
N
