Course Title:
Introduction to Microelectromechanical Systems (MEMS)
Course Description:
Introduces microelectromechanical systems, including principles of sensing and actuation, microfabrication technology for MEMS, noise concepts, and packaging techniques. Covers a wide range of disciplines, from electronics to mechanics, material properties, microfabrication technology, electromagnetics, and optics. Studies several classes of devices including inertial measurement devices, pressure sensors, rf components, and optical MEMS. Devotes the last third of the semester largely to projects involving design of MEMS devices to specifications in a realistic fabrication process.
Fall Offering:
Lab/Coreq 1:
Spring Offering:
Lab/Coreq 2:
Summer Offering:
Lab/Coreq Remarks:
Summer 1 Offering:
Prerequisite 1:
Summer 2 Offering:
Prerequisite 2:
Cross-Listed Course 1:
MTM G260
Prerequisite 3:
Cross-Listed Course 2:
Prerequisite 4:
Cross-Listed Course 3:
Prerequisite 5:
Cross-Listed Course 4:
Prerequisite Remarks:
Graduate standing in the College of Engineering.
Cross-Listed Course 5:
Repeatable:
N
