Course Title:
Micro- and Nanofabrication
Course Description:
Provides an overview of integrated circuit fabrication from the viewpoint of a process engineer. Students fabricate micro- and nanoscale devices in integrated lab sessions. Focuses on the physics, chemistry, and technology of integrated circuit fabrication in the lecture portion of the course, while students fabricate and test novel devices (an electrohydrodynamic micropump and three-dimensional carbon nanotube interconnects) in integrated lab sessions. Concentrates on silicon IC technology but also includes examples from other materials and device systems including microelectromechanical (MEMS) technologies that are used to build devices such as accelerometers, pressure sensors, and switches for telecommunications and other current examples provided from nanofabrication and nanotechnology. Lab hours are arranged.
Fall Offering:
Lab/Coreq 1:
Spring Offering:
Odd
Lab/Coreq 2:
Summer Offering:
Lab/Coreq Remarks:
Summer 1 Offering:
Prerequisite 1:
ECE U402
Summer 2 Offering:
Prerequisite 2:
Cross-Listed Course 1:
Prerequisite 3:
Cross-Listed Course 2:
Prerequisite 4:
Cross-Listed Course 3:
Prerequisite 5:
Cross-Listed Course 4:
Prerequisite Remarks:
Cross-Listed Course 5:
Repeatable:
N
