Course Title:
Electronic Materials, Thin Films, and Nanostructures
Course Description:
Presents the fundamental transport, kinetic, thermodynamic, and solid-state physics principles for semiconductor device processing. Emphasizes the various physical and chemical processes (including e-beam processes, sputtering, chemical vapor deposition, and molecular beam epitaxy) used in semiconductor technology and nanotechnology. Helps students appreciate the application of chemical engineering in the growing microelectronic industry, provides a working background in various microfabrication processes and ultrahigh vacuum technology, and introduces students to novel semiconductor material development and nanostructures.
Fall Offering:
Lab/Coreq 1:
Spring Offering:
Lab/Coreq 2:
Summer Offering:
Lab/Coreq Remarks:
Summer 1 Offering:
Prerequisite 1:
Summer 2 Offering:
Prerequisite 2:
Cross-Listed Course 1:
Prerequisite 3:
Cross-Listed Course 2:
Prerequisite 4:
Cross-Listed Course 3:
Prerequisite 5:
Cross-Listed Course 4:
Prerequisite Remarks:
Admission to the Graduate School of Engineering or permission of the department.
Cross-Listed Course 5:
Repeatable:
N
