Course Title:
Plasma Processing Seminar
Course Description:
Covers the fundamental physics of plasmas in a lecture format. Students then investigate state-of-the-art plasma processing techniques used in integrated circuit fabrication, MEMS, and other materials processing applications in a seminar format.
Fall Offering:
Lab/Coreq 1:
Spring Offering:
Lab/Coreq 2:
Summer Offering:
Lab/Coreq Remarks:
Summer 1 Offering:
Prerequisite 1:
Summer 2 Offering:
Prerequisite 2:
Cross-Listed Course 1:
Prerequisite 3:
Cross-Listed Course 2:
Prerequisite 4:
Cross-Listed Course 3:
Prerequisite 5:
Cross-Listed Course 4:
Prerequisite Remarks:
Graduate standing in ECE.
Cross-Listed Course 5:
Repeatable:
N
