Course Title:
Thin Film Technology
Course Description:
Presents processing techniques as well as the surface chemistry and physics involved in the growth and characterization of single-crystal, polycrystalline, and amorphous thin films. Emphasis is on microelectronic device applications and various forms of chemical vapor deposition and molecular beam epitaxy. Covers homoepitaxy, heteroepitaxy, heterostructure device fabrication, and current developments in advanced electronic materials.
Fall Offering:
Lab/Coreq 1:
Spring Offering:
Lab/Coreq 2:
Summer Offering:
Lab/Coreq Remarks:
Summer 1 Offering:
Prerequisite 1:
Summer 2 Offering:
Prerequisite 2:
Cross-Listed Course 1:
Prerequisite 3:
Cross-Listed Course 2:
Prerequisite 4:
Cross-Listed Course 3:
Prerequisite 5:
Cross-Listed Course 4:
Prerequisite Remarks:
Admission to Graduate School of Engineering or permission of the department.
Cross-Listed Course 5:
Repeatable:
N
